JPH036581Y2 - - Google Patents
Info
- Publication number
- JPH036581Y2 JPH036581Y2 JP1985092998U JP9299885U JPH036581Y2 JP H036581 Y2 JPH036581 Y2 JP H036581Y2 JP 1985092998 U JP1985092998 U JP 1985092998U JP 9299885 U JP9299885 U JP 9299885U JP H036581 Y2 JPH036581 Y2 JP H036581Y2
- Authority
- JP
- Japan
- Prior art keywords
- cassette
- pure water
- thin plate
- plate material
- arm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Warehouses Or Storage Devices (AREA)
- Pile Receivers (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1985092998U JPH036581Y2 (en]) | 1985-06-21 | 1985-06-21 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1985092998U JPH036581Y2 (en]) | 1985-06-21 | 1985-06-21 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS622533U JPS622533U (en]) | 1987-01-09 |
JPH036581Y2 true JPH036581Y2 (en]) | 1991-02-19 |
Family
ID=30650284
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1985092998U Expired JPH036581Y2 (en]) | 1985-06-21 | 1985-06-21 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH036581Y2 (en]) |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56107704U (en]) * | 1979-07-12 | 1981-08-21 | ||
JPS594591A (ja) * | 1982-06-29 | 1984-01-11 | ブライトエンジニアリング株式会社 | 昇降装置 |
-
1985
- 1985-06-21 JP JP1985092998U patent/JPH036581Y2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS622533U (en]) | 1987-01-09 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US4907701A (en) | Apparatus for inspecting the appearance of semiconductor devices | |
JP2921937B2 (ja) | Ic検査装置 | |
JP2009075102A (ja) | 検査装置及び検査方法 | |
JP2001144166A (ja) | 基板位置決め装置及び基板ハンドリング方法 | |
JPH036581Y2 (en]) | ||
JPS6224943B2 (en]) | ||
JP3210154B2 (ja) | 基板の姿勢変換装置 | |
JPS6325500B2 (en]) | ||
JPS5860553A (ja) | 縦型自動プラズマ処理装置 | |
CN217655862U (zh) | 一种晶圆装载装置及其校准装置 | |
CN110223944A (zh) | 晶圆清洗机台及其晶圆清洗方法 | |
JPH0737845A (ja) | 基板ウェット処理方法および処理システム | |
JP3346823B2 (ja) | 基板ウェット処理装置 | |
JPH05109877A (ja) | 基板支持装置 | |
CN110875209B (zh) | 处理装置 | |
JP3346834B2 (ja) | 基板ウェット処理装置 | |
JP2675734B2 (ja) | 薄板材浸漬装置 | |
JPH06271067A (ja) | 薄板材浸漬装置 | |
JP2506379B2 (ja) | 搬送方法及び搬送装置 | |
JP2587512Y2 (ja) | 基板収納状態検出装置 | |
JP3875435B2 (ja) | 基板支持機構 | |
JPH0648858Y2 (ja) | ウエハ収納容器 | |
JP2000323552A (ja) | ウエハローダ | |
JP3061339B2 (ja) | 洗浄装置 | |
JPS6339483B2 (en]) |